oxidation in fabrication

[vead]

silicon die oxide layer is formed on the surface of silicon wafer by the oxidation process
oxidation process
oxidation method
dry oxidation
wet oxidation


dry oxidation
Si+O2 -.> Sio2
wet oxidation
Si+2H2O -> Sio2+2H2

dry and wet oxidation are the type of thermal oxidation or thermal oxidation is different hings ?

what is post oxidation evaluation